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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems
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Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.
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Product details
Hardcover: 496 pages
Publisher: Small Gear Publishing (March 17, 2009)
Language: English
ISBN-10: 0982299109
ISBN-13: 978-0982299104
Product Dimensions:
7 x 1.1 x 10 inches
Shipping Weight: 2.2 pounds (View shipping rates and policies)
Average Customer Review:
4.7 out of 5 stars
12 customer reviews
Amazon Best Sellers Rank:
#176,842 in Books (See Top 100 in Books)
This MEMS book is a great introduction to MEMS - the explanations are clear with a nice overview of both MEMS devices and the signal conditioning that goes w/ them. I see this book being excellent for a first year graduate level course or for someone working in the field that would like to better understand MEMS devices. If you are looking for a more detailed book on MEMS device design and fabrication, etc., I recommend Senturia's MEMS book.
The book quite new with hard covers. Only few makers inside cannot effect reading. For the content and edition, it is organized clear with easy-understanding pictures. Strong recommend to readers interesting into micro sensors.
good book . the only disadvance is too expensive.
This book covers various kinds of MEMS used in the industry. Good as an introduction for chip designers.
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.
This book was extremely needed, and is outstanding. Many books out there cover MEMS and integrated circuit processing. Some books cover the different types of MEMS in pretty much a survey form. Other books cover the math, but never tie it to the nitty gritty of microdevices. This book is not a survey, or another mathmatical dynamics book. It is a book covering the actual design rules, basics, and math of the major categories of microsystems. Its written well, is both understandable and complete. It is the book I will be using to teach the first year graduate class on MEMS at my university.
As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.
It is good to find a book that covers MEMS devices from theory and design to cost and marketing. Having the information in one place is ideal for both students to learn the material and for researchers to use as a reference guide. This book helped me to design my first accelerometer and cantilever systems. The combination of fully worked out examples and easy to understand pictures helps lead to a greater understanding of MEMS devices. If you are considering entering the MEMS field and want to familiarize yourself or if you would like an easy to use reference, this is the book for you.
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